PROCEEDINGS OF THE EMAS '93 EUROPEAN WORKSHOP
Mikrochimica Acta, vols. 114 and 115, 544 . (1994)
Edited by: A. Armigliato, L. Van't dack, H.W. Werner and J. Wernisch

This volume of Mikrochimica Acta contains the texts of the invited lectures and a selection of the papers resented in poster form at the 3rd Workshop of the European Microbeam Analysis Society (EMAS). The Workshop was held in Rimini (Italy) on May 9-13, 1993 and focused on Modern Developments and Applications in Microbeam Analysis (Analytical Electron and Ion Microbeam Methods). The event was held under the auspices of C.N.R. (Consiglio Nazionale delle Ricerche) of Italy, whose sonsorship is gratefully acknowledged), of SIME (Società Italiana di Microscopia Elettronica) and of CESEM (Committee of European Societies for Electron Microscopy).

Nine invited speakers and about 200 particiants from 15 European and 2 non-European (USA and Australia) countries gave a comprehensive account of the current state-of-the-art in the field of material characterisation by means of electron and ion beam based microanalytical techniques.

At this Workshop, EMAS has chosen to emphasise the following topics: correction procedures in electron robe microanalysis (EPMA), standardless X-ray analysis of bulk samples and thin films, quantitative and high resolution Auger electron spectrometry (AES), electron energy loss spectrometry (EELS) mapping, microbeam analysis of articles, environmental SEM and quantitative analysis of thin films by ion beam methods (secondary ion mass spectrometry (SIMS), Rutherford backscattering sectrometry (RBS), channeling, nuclear reaction analysis (NRA)).

Each paper submitted for publication in this volume has been reviewed by two referees and modified accordingly. The editors are most grateful to the following scientific referees for their rapid and meticulous work:
M. Anderle, D. Benoit, A. Boekestein, R. Brydson, A. Carnera, J. Cazaux, C. Colliex, A. Desalvo, A.V. Drigo, P. Duncumb, J. Giber, R. Gijbels, M. Grasserbauer, T. H. Hehenkamp, E. Heikinheimo, F. Hofer, S. Hofmann, S. Jasienska, P. Karduck, K. Krishnan, J. L. Labar, G. W. Lorimer, G. Love, W. A. P. Nicholson, R. Oberhänsli, M. Otten, P. Pinard, J. L. Pouchou, G. Queirolo, L. Reimer, R. Rinaldi, A. Röder, G.M. Roomans, R. Rosa, J. Ruste, D. Shirikov, J. Small, P. Trebbia, P. Van Espen, M. Vittori Antisari, P. von Rosenstiel, C.T. Walker, and P. Willich.

The Euroean Microbeam Analysis Society is esecially leased to acknowledge the financial suort of this volume rovided for by EDAX International (Tilburg, The Netherlands)

Composition of vanadium carbides formed by solidification in temary Fe-V-C alloys S.E. Amara, R. Kesri, N. Valignat and S. Hamar-Thibault 157

Investigation of implanted gallium depth distributions in ZnS_xSe_1-x by EPMA N. Ammann, G. Gleitsmann, M. Heuken, K. Heime and P. Karduck 165

Electron and ion beam analysis of composition and strain in Si_1-xGe_x/Si heterostructures A. Armigliato, D. Govoni, R. Balboni, St. Frabboni, M. Berti, F Romanato and A.V Drigo 175

X-ray emission modulation by electron channelling and site occupancy in garnets R. Balboni, St. Frabboni, R. Rinaldi and S. Spigarelli 187

Quantitative EPMA of element depth distribution A. Berner and G. Proaktor 195

Influence of channeling effects on ion distribution and damage profiles during high-energy ion implantation in Si A. Camera, A. Gasparotto, M. Berti and R. Fabbri 205

Surface and interface analysis of titanium nitride diffusion barriers M. Bonelli, A. Miotello, L. Calliari, F. Romanato, A.V. Drigo and A. Carnera 213

Determining the local coordination of aluminium in cement using electron energy loss near-edge structure R. Brydson, L G. Richardson and G.W. Groves 221

Elaboration and characterisation of yttria PSZ coatings deposited by RF sputtering on silicon P. Chainiau, E. Beauprez and M.-Ch. Sainte Catherine 231

Changes in depth profiles of oxygen and copper in Y-Ba-Cu-O film under annealing L.P. Chemenko, A.P. Kobzev, D.A. Komeev and D.M. Shirokov 239

Damage in Y-Ba-Cu-O films produced by 4He ions L.P. Chernenko, A.R Kobzev, D.A. Komeev and D.M. Shirokov 247

An EELS and EXELFS study of amorphous hydrogenated silicon carbide A. Cook, A.G. Fitzgerald, F. Ibrahim, J.L.B. Wilson and Ph. John 255

Theoretical simulation of backscattered electron images of Si/Si_xGe_1-x structures with a scanning electron microscope A.C. De Riccardis, P.G. Merli, M. Nacucchi and L. Tapfer 261

Analysis of light elements in superposed layers by Monte Carlo simulation of EELS spectra A. Desalvo, R. Rosa, A. Armigliato and A. Parisini 267

Quantitative EPMA and TEM of unsupported films J.M. Dykstra, G.F. Bastin, H.J.M. Heyligers and D. Klepper 277

Silicate particles engulfed in human Alveolar macrophages: An analytical electron microscopy study M. Dociaiuti, M. Falchi and L. Paoletti 285

Quantification of the electron beam damage of thin films L. Frank 293

Monte Carlo correction programme for PC O. Gedeon and V. Hulínský 305

Performance of a nuclear microprobe to study giant marine aerosol particles J. Injuk, L. Breitenbach, R. Van Grieken and U. Wätjen 313

The role of coating densities in X-ray microanalysis K. Jurek, O. Renner and E. Krouský 323

Analytical, structural and electrical characterisation of SiGe layers by electron microbeam techniques M. Kittler and J. Lärz 327

Homogeneity studies of powders and plasma sprayed deposits B. Kolman, J. Forman, J. Dubský and P. Chráska 335

X-ray emission spectroscopy with EPMA applied to high-T_c superconductors using new spectrometer crystals A. Kottmann, P. Lamparter and S. Steeb 343

Microprecipitation in boron-containing high-carbon steels L. Lanier, G. Metauer and M. Moukassi 353

An accurate computer correction programme for quantitative electron probe microanalysis C. Merlet 363

Investigation of various SiC materials by means of EPMA/WDS techniques P. Moretto and R. Hoffmann 377

Use of cathode lens in scanning electron microscope for low-voltage applications L Müllerová and L. Frank 389

Physico-chemical characterisation of crystalline phases in fly ashes L. Paoletti, M. Diociaiuti, A. Gianfagna and G. Viviano 397

Electron probe microanalysis of dried biological substances A. Pogorelov, V Pogorelova, S. Smimova and N. Spifidonov 405

Spatial resolution limitation in Auger microanalysis of compounds B.A. Polonsky and O.D. Protopopov 413

X-ray microanalysis of thin film layered specimens containing light elements D.G. Rickerby and J.-F. Thiot 421

Structural characterisation techniques for the analysis of semiconductor strained heterostructures F. Romanato, M. Berti, M. Mazzer, A.V Drigo, L. Lazzatini, P. Franzosi, G. Salviati and D. Bertone 431

PIXE and EMP analyses of volcanites from Nea Kameni Island (Aegean Sea, Greece) A.P. Santo, J.D. MacArthur and R. Manetti 441

Application of analytical transmission electron microscopy to the characterisation of interlayers in fibre-reinforced composites with ceramic and glass matrices R. Schneider, J. Woltersdorf, E. Pippel, A. Hähnel and A. Röder 453

Signal-to-background in EPMA: Measurement and Monte Carlo calculation V. Stary 463

EPMA analysis of float glass surfaces A. Stella and M. Veritá 475

SIMS and Auger investigation of oxygen adsorption on polycrystalline nickel surface Z. Tass and K.V Josepovits 481

New developments in theory of fast electron scattering in solids: Applications to microbeam analysis L.S. Tilinin and W.S.M. Wemer 485

SIMS imaging: Apparatus and applications A.B. Tolstogouzov, T.L. Kitaeva and S.S. Volkov 505

Combined EPMA and AES depth profiling of a multilayer Ti-Al-O-N coating A. von Richthofen, M. Matsuo, P. Karduck and N. Ammann 511

Quantitative analysis of W-C:H coatings by EPMA, RBS (ERD) and SIMS P. Willich, M. Wang and K. Wittmaack 525

Study of chemical bonds in a-B/C:H films by electron probe microanalysis R.K. Zalavutdinov, A.E. Gorodetsky and A.P. Zakharov 533

X-ray mapping of freeze-dried cryosections from biological cells K. Zierold and S.V Buravkov 539